Products
SiC Crystal Growth Equipment
Product overview
SiC Crystal Growth Equipment
The Intelligent PVT SiC System (IPS) series are professional equipment for high-quality SiC crystal growth, high-purity raw material synthesis and high-temperature crystal heat treatment. They are widely applied in the fields of SiC crystal growth, raw material synthesis, and crystal heat treatment.
Product advantages
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Designed for power electronics applications |
-Applicable for power electronics applications, highly automated, and suitable for mass production. -Small footprint and compact in size -Fab management software solutions |
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Low-consumption coil design |
-Low power consumption (stably controlled at approx. 2,200°C 10KW) |
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Excellent Security Concept |
-CE Compliance -System safety components at different levels for safe operation -Documentation for quality measurements and extension |
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Intelligent Control System |
- iGOS Fully Automated Crystal Growth Program: Integrates graphical programmable software and C+ vision software to achieve precise customization of multiple processes, which is capable of optimizing and compressing certain processes to improve efficiency. |
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Intelligent Self-Check System |
- The industry - first PIM (Pre-inspection Model) self-check system: This is a system check prior to the production process for the purpose of averting delaying the crystal growth cycle due to failures of lines or related devices during the production process, thus effectively avoiding the unnecessary waste of processing time. |
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High quality of finished products |
The rate of yield is in the leading position in China and the first-class level in the world. -Microtubule defect density <5/cm2 ( <10/cm2 in the world) -Resistivity of single crystal wafer reaches 0.015-0.028Ωcm (in line with international standards). |
Technical parameters
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serial number |
project |
content |
Specifications/parameters |
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01 |
Cavity |
Work pressure |
≈1-900mbar |
|
02 |
Cavity |
Operating temperature |
Up to 2600°C |
|
03 |
Power consumption |
power |
Maximum 60KW |
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04 |
Power consumption |
frequency |
6-12 kHz |
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05 |
|
size |
2000(W)*1200(D)*2,800(H)mm |
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06 |
|
weight |
1,300kg (2000kg with control cabinet) |
PVT
Physical Vapor Transport Method
Service Hotline
ZORRUN SEMICONDUCTOR CO., LTD
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
Contact: Ms. Xi (Human Resources Department)
Tel: 86-18112296722
Contact:Mr. Sun (Marketing Center)
Tel: 86-18609881815
Emeil：sunxu@zorrun.com
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Service Hotline: 86-513-87276777
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
E-mail: service@zorrun.com
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