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SiC Substrate Slice

Product overview

With the world's first iGOWER vision intelligent crystal growing robot device, ZORRUN SEMICONDUCTOR adopts the PVT method to grow SiC substrate crystal wafers, into which the pre-treatment process technology for raw materials is added. It increases the purity and density of raw materials and reduces the possible defects in crystals. The process level is at the forefront of China.
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SiC Substrate Slice


SiC substrate slice is an indispensable and important material to support the electronic and electric power industry, with excellent characteristics of band gap, drift speed, breakdown voltage, thermal conductivity, high temperature resistance and so on, which is several times higher than the traditional silicon. It has irreplaceable advantages in high temperature, high voltage, high frequency, high power, photoelectricity, anti-radiation, microwavability and other electronic applications and extreme environment applications such as aerospace, military, nuclear energy and so on.

 

Technical parameters

*N-Type & High purity SiC Wafer

serial number

quality

4H silicon carbide substrate

6H silicon carbide substrate

01

diameter

100+0/-0.5mm

150±0.2mm

02

thickness

350±25um

350±25um

03

Resistivity

0.015~0.025Ω.cm

0.015~0.025Ω.cm

04

Primary positioning edge direction

{10-10}±5°

{10-10}±5°

05

Primary positioned edge length

32.5±2.0mm

47.5±2.0mm

06

Local thickness changes

≤4um

≤5um

07

Total thickness change

≤10um

≤15um

08

Curvature

≤25um

≤40um

09

Warpage

≤35um

≤60um

10

Surface roughness

Ra<0.5nm

Ra<0.5nm

11

Scratches

None

None

12

Chipping

None

None

13

Polycrystalline

None

None

14

Six-square hollow

Cumulative area≤0.05%

Cumulative area≤0.05%

15

Surface contaminants

None

None

Keywords:

SiC Substrate Slice

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Service Hotline

86-513-87276777

ZORRUN SEMICONDUCTOR CO., LTD
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
Contact: Ms. Xi (Human Resources Department)
Tel: 86-18112296722
Contact: Eric (Marketing Center)
Tel: 86-18112296790

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Service Hotline: 86-513-87276777

Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province

E-mail: service@zorrun.com

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