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SiC Epitaxial Wafers

Product overview

The 100mm/150mm SiC epitaxial wafers produced by ZORRUN SEMICONDUCTOR have excellent uniformity and epitaxial thickness up to 250um. We provide a complete set of SiC epitaxial solutions with regard to different specifications.
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SiC Epitaxial Wafers


SiC epitaxial process is a key technology in the semiconductor industry. Epitaxial wafers grown with silicon carbide crystals as substrates are mainly used in the fabrication of a variety of discrete devices, such as Schottky diodes, MOSFETs, JEETs, BJTs, IGBTs, thyristors, etc. These devices are widely used in the fields of photovoltaic inverters, hybrid electric vehicles, solar and wind power generation, UPS, motor control, railway locomotives, ships and smart grids, and so on.

 

Technical parameters

*100mm/150mm SiC Epi Wafer

serial number

Specifications/parameters

4H epitaxy

6H epitaxy

01

Thickness(um)

11

~11

02

Thickness range

≤7%

≤8%

03

Doping type

N-type or semi-insulated

N-type or semi-insulated

04

Doping level (/cm3)

6E15~8E15

6E15~8E15

05

Doping range

≤13%

≤13%

06

Defect density (/cm3)

≤1.3

≤1.3

07

BPD density (/cm2)

≤0.1

≤0.1

08

Surface roughness (nm)

Ra≤0.3

Ra≤0.3

* Other optional sizes include 76.2mm and 125mm in diameter, and can also be customized as required by customers.

Keywords:

SiC Epitaxial Wafers

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86-513-87276777

ZORRUN SEMICONDUCTOR CO., LTD
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
Contact: Ms. Xi (Human Resources Department)
Tel: 86-18112296722
Contact: Du Manager (Marketing Center)
Tel: 86-18112296790

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Service Hotline

86-513-87276777

ZORRUN SEMICONDUCTOR CO., LTD
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
Contact: Ms. Xi (Human Resources Department)
Tel: 86-18112296722
Contact: Du Manager (Marketing Center)
Tel: 86-18112296790

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Service Hotline: 86-513-87276777

Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province

E-mail: service@zorrun.com

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