Products

Products

Gas Extraction Equipment

Product overview

ZORRUN SEMICONDUCTOR has developed gas extraction equipment by utilizing advanced process technology and gas extraction technology, which needs to be used in concert with our Intelligent Gas Injection System (IGI) series.
Contacts

Gas Extraction Equipment


The Intelligent Gas Extraction System (IGE) series, prepared using Microwave Plasma Chemical Vapor Deposition (MPCVD), are mainly used for dopant gas extraction in the process of diamond crystal growth.

 

Technical parameters

serial number

project

Specifications/parameters

01

Size (approx.)

1400 watts x700D X1950H (mm)

02

Weight (approx.)

350 kg

03

Microwave power

1.3kw/2.45GHZ

04

Cavity material

Aluminum alloy

05

Cooling method

Water-cooling

06

Chassis height

14mm

07

Main gas pipelines

H₂

08

Operating pressure range

10-300 dry

09

Vacuum leak detection value

1X10-6mbar.l/sec

10

vacuum pump

Rotary Pump(250)liters Per Min

11

CDA pressure

2-4 kg/cm2

12

Hydraulic

3-5kg/cm2

13

voltage

3Φ220V±10%/50Hz/60Hz

14

current

20 A

Keywords:

Gas Extraction

Diamond

Service Hotline

86-513-87276777

ZORRUN SEMICONDUCTOR CO., LTD
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
Contact: Ms. Xi (Human Resources Department)
Tel: 86-18112296722
Contact: Du Manager (Marketing Center)
Tel: 86-18112296790

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Service Hotline

86-513-87276777

ZORRUN SEMICONDUCTOR CO., LTD
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
Contact: Ms. Xi (Human Resources Department)
Tel: 86-18112296722
Contact: Du Manager (Marketing Center)
Tel: 86-18112296790

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Copyright©2023 ZORRUN SEMICONDUCTOR CO., LTD. All Rights Reserved.

Service Hotline: 86-513-87276777

Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province

E-mail: service@zorrun.com

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