Products
Gas Extraction Equipment
Product overview
Gas Extraction Equipment
The Intelligent Gas Extraction System (IGE) series, prepared using Microwave Plasma Chemical Vapor Deposition (MPCVD), are mainly used for dopant gas extraction in the process of diamond crystal growth.
Technical parameters
|
serial number |
project |
Specifications/parameters |
|
01 |
Size (approx.) |
1400 watts x700D X1950H (mm) |
|
02 |
Weight (approx.) |
350 kg |
|
03 |
Microwave power |
1.3kw/2.45GHZ |
|
04 |
Cavity material |
Aluminum alloy |
|
05 |
Cooling method |
Water-cooling |
|
06 |
Chassis height |
14mm |
|
07 |
Main gas pipelines |
H₂ |
|
08 |
Operating pressure range |
10-300 dry |
|
09 |
Vacuum leak detection value |
1X10-6mbar.l/sec |
|
10 |
vacuum pump |
Rotary Pump(250)liters Per Min |
|
11 |
CDA pressure |
2-4 kg/cm2 |
|
12 |
Hydraulic |
3-5kg/cm2 |
|
13 |
voltage |
3Φ220V±10%/50Hz/60Hz |
|
14 |
current |
20 A |
Gas Extraction
Diamond
Service Hotline
ZORRUN SEMICONDUCTOR CO., LTD
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
Contact: Ms. Xi (Human Resources Department)
Tel: 86-18112296722
Contact:Mr. Sun (Marketing Center)
Tel: 86-18609881815
Emeil：sunxu@zorrun.com
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Service Hotline: 86-513-87276777
Address: No. 6, Telecom East 1st Road, Rugao City, Jiangsu Province
E-mail: service@zorrun.com
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